Microwave Excited Low Temperature High Density Plasma Process.

Ultra High Temperature Microwave Sintering – Furnace and Process Design

Scale up of microwave sintering for high temperature stable non-oxide ceramics, such as SiC, Si3N4, and dispersion ceramics, like SiC-MoSi2 is still difficult, mainly because of lack of an affordable equipment. For air atmosphere sintering different furnaces were developed, like e.g., gas-microwave hybrid heated tunnel kilns [1] or microwave sintering using an adiabatic casket in tunnel kilns [...

Low Temperature Plasma Technology Laboratory Use of Langmuir probes in high density plasmas

Low Temperature Plasma CVD Grown Graphene by Microwave Surface-Wave Plasma CVD Using Camphor Precursor

Hydrocarbon precursor such as methane has been widely used to grow graphene films and the methods of growing quality graphene films are dominated by thermal CVD (chemical vapor deposition) system. Graphene films grown by plasma process are generally highly defective which in turns degrade the quality of the films. Here, using a green precursor, camphor we demonstrate a simple and economical met...

A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding

This paper presents the development and characterization of a new high-aspect-ratio MEMS process. The silicon-on-silicon (SOS) process utilizes dielectric barrier discharge surface activated low-temperature wafer bonding and deep reactive ion etching to achieve a high aspect ratio (feature width reduction-to-depth ratio of 1:31), while allowing for the fabrication of devices with a very high an...

Perturbing microwave beams by plasma density fluctuations

The propagation of microwaves across a turbulent plasma density layer is investigated with fullwave simulations. To properly represent a fusion edge-plasma, drift-wave turbulence is considered based on the Hasegawa-Wakatani model. Scattering and broadening of a microwave beam whose amplitude distribution is of Gaussian shape is studied in detail as a function of certain turbulence properties. P...